Laboratory Vacuum Atmosphere Tube Furnace 1200 1400 1700 Degree Chemical Vapor Deposition CVD Diamond Machine

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Product Description

CVD System

The CVD system adopts conventional tubular furnace with corresponding flow control system and vacuum pump to realize the whole set of vapor deposition system. The heating can be 1200 ℃, 1400 ℃, 1700 ℃ and other temperature zone tubular furnaces. The gas

configuration can be 1-5-way float flowmeter or mass meter, and the vacuum system can choose 0.5-8-liter mechanical pump,

diffusion pump and molecular pump. The vacuum degree can reach up to 10-5pa.

TEFIC TK2 Vacuum Atmosphere Tube Furnace

Application	It is widely used in scientific research and small batch production of enterprises and institutions, as well as in the fields of ceramics, metallurgy, electronics, glass, chemical engineering, machinery, refractory, new material development, special materials and building materials.
Temperature	1200℃	1400℃	1700℃
Temperature control accuracy	±1℃	±1℃	±1℃
Thermocouple and measuring range	K type（0-1200℃）	S type（0-1600℃）	B type（0-1820℃）
Heating element	Resistance wire	Silicon carbon rod	Silicon molybdenum rod
Appearance design	The electric furnace adopts humanized design, which is beautiful and easy to operate. The outer layer of paint is baked by spraying plastic at high temperature. It has high temperature resistance, oxidation resistance and acid-base resistance. Color selection for aging resistant hue, not because of the use of a long time to produce appearance color fading.
Body design	The double-layer forced air cooling structure is adopted in the electric furnace shell, which makes the external temperature of the furnace shell close to the room temperature when the furnace is working at the highest temperature, thus avoiding the occurrence of accidental injury.
Temperature control	Adopt international advanced temperature control instrument: with 30-50 segment programmable PID self-tuning, automatic heating, automatic cooling, no need to be on duty. RS-485 communication interface can also be selected (connect with ordinary computer to start, stop, pause temperature rise, set temperature rise curve, store temperature rise curve, record historical curve, etc.)
Temperature control safety	The furnace adopts integrated circuit, module control, double circuit protection (partial temperature protection, ultra-high temperature protection, broken couple protection, over current protection, overpressure protection and other protection functions) to make the furnace work stable, reliable and safe.
Chamber material	The light alumina ceramic fiber is used internationally, which has excellent heat preservation effect, light weight, high temperature resistance, quick cooling and heat resistance, no crack, no crystallization, no slag falling, no worry about pollution of the products. The energy saving effect is 60% to 80% of the old electric furnace.
Chamber design	The furnace adopts the step type assembling structure and integrates the mechanical laws, which effectively guarantees the uniform stress of the furnace in the heating process, ensures that the heat energy is not easy to be lost, and extends the service life of the furnace.
Can be added gas	All inert gases, mixtures, nitrogen, carbon dioxide, water vapor, argon and oxygen
Gas control	The air inlet can be provided with 1 or more air inlets, and each air inlet is provided with a needle valve and connected with a vacuum meter. The air outlet end is connected with an air outlet, and all holes are provided with needle valves. Equipped with a vacuum pump.
Sealing mode	304 stainless steel flange, with easy loading and unloading, oxidation resistance, acid and alkali resistance, double sealing, to ensure the sealing.
Warranty	The electric furnace is free of charge for 12 months (except for heating body), and the heating body and cooling fan shall be replaced free of charge in case of natural damage within 3 months.
Accessories	Standard accessories: a vacuum pump, a crucible pliers, a pair of special high temperature gloves. One copy of operation manual. Optional accessories: touch screen control, paperless recorder, remote communication control system.

Vacuum Pump

Product specifications

1200℃ vacuum atmosphere tube furnace

1400℃ vacuum atmosphere tube furnace

1700℃ vacuum atmosphere tube furnace

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Laboratory Vacuum Atmosphere Tube Furnace 1200 1400 1700 Degree Chemical Vapor Deposition CVD Diamond Machine

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